There is good paper on this subject: "Factors enhancing the reliability of touch-mode electrostatic actuators" S&A 79(2000)245-250. You can find in it all the failure modes at stiction Atzmon Ofri-TeraOp Inc. -----Original Message----- From: Fende, John R. [mailto:JohnF@xetron.com] Sent: Wednesday, October 16, 2002 3:33 PM To: mems-talk@memsnet.org Subject: RE: [mems-talk] Re: stiction of contacting surfaces It seems Wenlin is talking about stiction occuring after fabrication, where van der waals and surface tension are out of the picture. Do you have any knowledge of causes of stiction after a working device is activated several times? John Fende > -----Original Message----- > From: J [SMTP:jhwen@ycity.com.tw] > Sent: Thursday, October 10, 2002 5:57 PM > To: mems-talk@memsnet.org > Subject: [mems-talk] Re: stiction of contacting surfaces > > Dear Wenlin, > mainly the stiction comes from dry process. water capillary force may draw > beam towards substrate and other forces like van der waals or surface > tension developed. > the solutions might be heat up when you dry it, or use solution such as > IPA to lower the surface tension, XeF2 or CO2 for supercritical > sublimation, or simply modify your layout structures for anti stiction. > good luck. > > Inst. of MEMS, NTHU > > > Message: 8 > To: mems-talk@memsnet.org > From: Wenlin.Jin@jdsu.com > Date: Thu, 10 Oct 2002 09:58:02 -0400 > Subject: [mems-talk] stiction of contacting surfaces > Reply-To: mems-talk@memsnet.org > > Hello: > > I'm working on electrostatic curved beams. It has been observed that > after certain cycles of operation, stiction of the beam to substrate > occurs. I'm wondering if there are researches done on the mechanism of the > stiction and how it can be avoided. Any information will be appreciated. > > Best regard > > Wenlin Jin > > > > _______________________________________________ > MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list > options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk > Hosted by the MEMS Exchange, providers of MEMS processing services. > Visit us at http://www.memsnet.org/ _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/