durusmail: mems-talk: MEMS air flow devices
MEMS air flow devices
2002-10-17
MEMS air flow devices
somerville j
2002-10-17
I am currently starting my literature survey on a
similar topic.

I know of some piezo electric pumps based on diffuser
nozzles but these are pretty standard and not very
effective for compressable fluids.

I would appreciate a summary of any answers you get as
a useful starting point.

Thanks

John



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