durusmail: mems-talk: 3 D Lithography
3 D Lithography
2002-10-16
2002-10-17
3 D Lithography
Sonia Garcia Blanco
2002-10-17
Dear Rob,

What do you mean by 3-D lithography? Do you mean grey scale lithography?

Best regards,

Sonia.

Quoting Rob Hardman :

> Dear Members,
>
> One of our customers has had some very interesting results using SU-8
> for 3 D lithography. Has anybody else tried this?
>
> Very Best Regards,
> Rob Hardman
> 617-965-5511 ext.313
> rhardman@microchem.com
>
> www.microchem.com
>
>
>
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>



Sonia Garcia-Blanco

Phone: +33 (0) 141 330 5230
Department of Electronics&Electrical Engineering
Rankine Building
Oakfield Ave. G12 8LT
Glasgow
Scotland
UK


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