Hi Sonia,

Yes, it would include gray scale. Actually I would consider gray scale to be a
subset of 3D lithography, whereas 3D lithography itself would be the creation of
features with vertical height modulation.

Regards,
Rob
Message: 2

To: mems-talk@memsnet.org

Subject: Re: [mems-talk] 3 D Lithography

Date: Thu, 17 Oct 2002 16:54:05 +0100 (BST)

From: Sonia Garcia Blanco 

Reply-To: mems-talk@memsnet.org

Dear Rob,

What do you mean by 3-D lithography? Do you mean grey scale lithography?

Best regards,

Sonia.

Quoting Rob Hardman :

> Dear Members,

>

> One of our customers has had some very interesting results using SU-8

> for 3 D lithography. Has anybody else tried this?

>

> Very Best Regards,

> Rob Hardman

> 617-965-5511 ext.313

> rhardman@microchem.com