durusmail: mems-talk: Re: KOH-Etch simulation
Re: KOH-Etch simulation
1996-02-28
1996-02-29
1996-02-29
1996-02-29
Re: KOH-Etch simulation
Peter Will
1996-02-29
Try Erik Antonsson at Caltech. He has such a program...  or something very
close

Peter

>
> Hello everyone,
>
> I am interested in a simulation program for the anisotropical etching of
> <100> silicon wafers using KOH. Does anyone have some information about
> this?
>
> Greetings,
>
> Henk.
>
>


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