Hello, 1/To measure the reverse piezoelectric coeffience d33 of "a layer" you have to make a sandwich of it, between two elctectods on a thick substrate (2mm) you can apply a AC voltage (frequency f0) to the layer and you measure the displasment of the top surface with a calibrated AFM or interferometer. For the AFM method, you have to use the A-B signal from the photodetector with the frequency f0, ie filtered with an lock-in amplifier. 2/It exists a methode to measure the direct piezoelectric coefficient e31 on which you collect the charges created by the piezo on the electrode during the vibration on a cantilever covered with the piezoelectric material. Here are some refs to help you on points 1/ A-L Kholin et al. Rev Sci Instrum Vol 67 No 5 May 1996 1935 M-A Dubois et al, Appl Phys Lett, Vol 89, No 11 (2001) 6389 C-M Lueng et al J Appl Phys, Vol 88, No 9 (2000) 5360 J-A Christman et al App Phys Lett, Vol73, No 26 (1998) 3851 2/ E Cattan et al, Sensors and Actuators 74 (1999) 60 B Jaber et al, Sensors and Actuators A 63 (1997) 91 J-F Shepard Jr et al, Sensors and Actuators A 71 (1998) 133 Best regards, Vincent Mortet -----Original Message----- From: mems-talk-admin@memsnet.org [mailto:mems-talk-admin@memsnet.org]On Behalf Of Xiaoqin Huang Sent: woensdag 23 oktober 2002 19:56 To: mems-talk@memsnet.org Subject: [mems-talk] Piezoelectricity Measurement Hi all, I am planning to measure the piezoelectricity of ZnO, but I just know a bit about this kind of measurement. If you are familiar with this measurement, please give me some suggestions. Thank you very much. Jenny X. Huang _______________________________________________ MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list options, visit http://www.memsnet.org/mailman/listinfo/mems-talk Hosted by the MEMS Exchange, providers of MEMS processing services. Visit us at http://www.memsnet.org/