Green spots sounds like copper oxide.
Could there be a copper contamination in you evaporator?


----- Original Message -----
From: "Madanagopal K.V." 
To: 
Sent: Monday, October 21, 2002 8:43 PM
Subject: [mems-talk] green gold


> Hi,
> We evaporated about 50nm gold onto glass substrates.  Some greenish spots
> are seen on parts of the film.  Has anyone seen it before?
>
> Thanks
> Madan
>
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> K.V.Madanagopal, Ph.D.
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