durusmail: mems-talk: Thick PECVD SiN vendor
Thick PECVD SiN vendor
2002-10-24
2002-10-25
Thick PECVD SiN vendor
Tom Wester
2002-10-24
Hi,
Does anyone know of a vendor who can deposit a 10 micron poly silicon
layer? Keeping the stress down is important.

Regards,
Tom Wester

ProcessTek
PO Box 315
Lynnfield, MA 01940
office 781-595-1355, fax 781-595-9582
tom_wester@ieee.org


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