Hi Yanjun,
If you prefer AFM, Sensors and Actuators A, 85 (1-3): 84-89, 2000 could be
of interest. You might also consider a CD or DVD pickup for measuring
displacement and resonance frequency. Catch focus on the cantilever and then
excite the cantilever beam. The focus error signal obtained from the pickup
represents the cantilever displacement. Since there are no moving parts
(just photo diode+ adding circuit), the measurement should be fast enough to
determine the cantilever resonance frequency. Commercial optical recording
pickups are commonly applied as accurate displacement sensors e.g. in
surface profilometers.
Kind regards,
Warner Venstra
________________________________________________________________
Warner J. Venstra                                               Delft
University of Technology
PhD student                                                     Mekelweg 2
Department of Mechanical Engineering            2628CD Delft
                                                                        The
Netherlands
                                                                tel: +31 (0)
15 27 86586
                                                                fax: +31 (0)
15 27 83910

w.j.venstra@wbmt.tudelft.nl

> -----Original Message-----
> From: Yanjun(David) Tang [SMTP:yta001@latech.edu]
> Sent: Thursday, October 24, 2002 7:06 AM
> To:   mems-talk@memsnet.org
> Subject:      [mems-talk] Mechanical property measurement of cantilever
>
> Hi,folks
> I'm trying to measure the mechanical properties of silicon dioxide
> microcantilever, such as spring constant, resonant frequency, etc. The
> geometry of cantilever is about 200*150*1micron. Do you have suggestions
> about how to do the job? What kinds of instruments are needed?  I heard
> that AFM can be used to measure. I just don't know how? Any opinions will
> be appreciated. Thanks.
>
> Best regards
>
> Yanjun(David) Tang
>
> Graduate student
> Institute for Micromanufacturing
> Louisiana Tech University
>
> 1401 Tech Farm Rd. Apt. #238, Ruston, LA 71270, USA
> Email: yta001@coes.latech.edu
>           tang_yanjun@yahoo.com
>
> Tel: 1-318-255-5133
> _______________________________________________
> MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list
> options, visit http://www.memsnet.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.memsnet.org/