1000A Tantalum would be a good barrier for Au. Of all the barriers that I tried,
Ta, Ti,TiW,
NiV,Cr, I found Ta to be the best. You can also look at the data for diffusion
coefficients of
different metals into Au at different temperatures and find out what would work
best for you.
Lakshmikanth Namburi.
Process Engineer,
Teravicta Technologies Inc.
Austin TX.


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