Hi,
I suggest that you may use PZT thin filmd to try it.
Qifa
> Hi,
>
> I've not experience with this configuration. However I 'd like to prepare
> such cantilever with a piezoelectric layer and electrodes to measure the
> d31. According to me, you should have a look on refs // E Cattan et al,
> Sensors and Actuators 74 (1999) 60 and // B Jaber et al, Sensors and
> Actuators A 63 (1997) 91, were a measurment of e31 with a cantilever is
> described.
>
> Best regards,
> Vincent Mortet
>
> -----Original Message-----
> From: mems-talk-admin@memsnet.org [mailto:mems-talk-admin@memsnet.org]On
> Behalf Of Priyanka Aggarwal
> Sent: donderdag 24 oktober 2002 19:12
> To: mems-talk@memsnet.org
> Subject: Re: [mems-talk] Piezoelectricity Measurement
>
>
> Hi,
> I am also working on the same lines. I was wondering where should I have the
> metal contacts,I want to have them on the fixed end of the cantilever , but
> I am not sure how to make metal contacts till that surface. CAn you suggest
> something.I am attching a document to make it clearer.
> Thanks
> Priyanka
>
>
>
>
>
> ----- Original Message -----
> From: "Vincent Mortet"
> To:
> Sent: Thursday, October 24, 2002 2:59 AM
> Subject: RE: [mems-talk] Piezoelectricity Measurement
>
>
> > Hello,
> >
> > 1/To measure the reverse piezoelectric coeffience d33 of "a layer" you
> have
> > to make a sandwich of it, between two elctectods on a thick substrate
> (2mm)
> > you can apply a AC voltage (frequency f0) to the layer and you measure the
> > displasment of the top surface with a calibrated AFM or interferometer.
> For
> > the AFM method, you have to use the A-B signal from the photodetector with
> > the frequency f0, ie filtered with an lock-in amplifier.
> >
> > 2/It exists a methode to measure the direct piezoelectric coefficient e31
> > on which you collect the charges created by the piezo on the electrode
> > during the vibration on a cantilever covered with the piezoelectric
> > material.
> >
> > Here are some refs to help you on points 1/ A-L Kholin et al. Rev Sci
> > Instrum Vol 67 No 5 May 1996 1935
> > M-A Dubois et al, Appl Phys Lett, Vol 89, No 11 (2001) 6389
> > C-M Lueng et al J Appl Phys, Vol 88, No 9 (2000) 5360
> > J-A Christman et al App Phys Lett, Vol73, No 26 (1998) 3851
> >
> > 2/ E Cattan et al, Sensors and Actuators 74 (1999) 60
> > B Jaber et al, Sensors and Actuators A 63 (1997) 91
> > J-F Shepard Jr et al, Sensors and Actuators A 71 (1998) 133
> >
> > Best regards,
> > Vincent Mortet
> >
> > -----Original Message-----
> > From: mems-talk-admin@memsnet.org [mailto:mems-talk-admin@memsnet.org]On
> > Behalf Of Xiaoqin Huang
> > Sent: woensdag 23 oktober 2002 19:56
> > To: mems-talk@memsnet.org
> > Subject: [mems-talk] Piezoelectricity Measurement
> >
> >
> > Hi all,
> >
> > I am planning to measure the piezoelectricity of ZnO, but I just know a
> > bit about this kind of measurement. If you are familiar with this
> > measurement, please give me some suggestions. Thank you very much.
> >
> > Jenny X. Huang
> >
> >
> >
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>
>
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