Hi there,

We bought stainless steel (grade 316) sputter targets from Balzers
& Leyboldt Singapore. I'm sure they are available from their other
worldwide representatives as well.
With e-beam or other evaporation methods it is very difficult to
get consistent results for depositing alloys or compounds: Because
of different vapour pressures, one material evaporates first and
depletes from the target, resulting in film composition drift over
lifetime of the target.

Greetings,
    Frank Berauer
    Senior R&D Engineer
    Hewlett-Packard Singapore


-----Original Message-----
From: Michele Migliuolo [mailto:michelem@verimetra.com]
Sent: Friday, October 25, 2002 7:59 PM
To: Tim
Subject: re: [mems-talk] depositing stainless steel thin films


Robert:

I have deposited stainless by sputtering. You will not be able to buy a
target, just get your machine shop to make you one.

Sincerely

Michele Migliuolo
Verimetra, Inc.
 >>  >Hello,

 >>  Does anyone know if it is possible to deposit a thin layer of stainless

 >>  steel (any of the stainless steel alloys) by sputtering or E-beam
 >>  deposition?  I have not been able to locate a target for either
 >>  process.  Stainless steel has some interesting adhesion properties I
would
 >>
 >>  like to exploit in MEMS applications.

 >>  Sincerely,

 >>  Robert Dean

 >>  Research Associate IV
 >>  Center for Advanced Vehicle Electronics
 >>  Auburn University
 >>  200 Broun Hall
 >>  Auburn, AL 36849

 >>  Voice: 334-844-1838
 >>  Fax:   334-844-1898
 >>  Email: rdean@eng.auburn.edu
 >>  Web: http://www.eng.auburn.edu/~rdean


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