Doesn't the same thing happen with sputtering since the sputter rate of the different species (i.e. Fe/Cr/Ni) is not the same. This is a known problem for NiTi SMA and I would surprised if you don't have the same problem for stainless... Michael Pedersen -- MEMS-Exchange e-mail: pedersen@mems-exchange.org Please visit us @: www.mems-exchange.org BERAUER,FRANK (HP-Singapore,ex7) wrote: > Hi there, > > We bought stainless steel (grade 316) sputter targets from Balzers > & Leyboldt Singapore. I'm sure they are available from their other > worldwide representatives as well. > With e-beam or other evaporation methods it is very difficult to > get consistent results for depositing alloys or compounds: Because > of different vapour pressures, one material evaporates first and > depletes from the target, resulting in film composition drift over > lifetime of the target. >