durusmail: mems-talk: depositing stainless steel thin films
depositing stainless steel thin films
depositing stainless steel thin films
Michael Lake
2002-10-28
Michael Pedersen wrote:
> Doesn't the same thing happen with sputtering since the sputter rate of
> the different species (i.e. Fe/Cr/Ni) is not the same. This is a known
> problem for NiTi SMA and I would surprised if you don't have the same
> problem for stainless...

Yes he will have that problem of the composition of his thin films being
different to the stainless target.
Put in a stainless target of a known composition say 316 stainless
steel. Analyse the composition of the deposited film to see what species
are deficient.  Then pick an alloy with a higher percentage composition
of that deficient species. Stainless steel comes in so many different
alloys that there may be one that will suit you. Your hard time will be
getting the alloy you want in a small quantity. See if they have offcuts
at a stainless merchant and get your workshop to cut it to shape.

Mike
--
Mike Lake
Uni of Technol., Sydney


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