Below is an abstract of a paper that shows the potential of (quartz or other)
microresonator arrays for IR imaging and chem/bio sensing. A preprint of the
full IEEE Frequency Control Symposium paper is available via FTP at 144.252.1.1
(or at FTMON.ARL.MIL). Login:anonymous; password: enter anything, preferably
your E-mail address; cd IEEE_FCS; cd PAPERS; get SENSOR.DOC.

Microresonator Sensor Arrays

John R. Vig*, Raymond L. Filler* and Yoonkee Kim**
*U.S. Army Research Laboratory, Fort Monmouth, NJ 07703-5601
**National Research Council - Resident Research Associate

A high-sensitivity sensor and sensor array is proposed which can be used for
infrared (IR) detection and imaging, and for chemical, biological agent and
other types of sensing. The sensing elements consist of quartz microresonators.
Calculation shows that an array of microresonators in the 200 MHz to 1 GHz
range can be the basis of an uncooled IR imaging system with a noise equivalent
temperature difference, NETD, of < 0.01 K which is superior to the (actual)
performance of state-of-the-art uncooled imaging arrays and is competitive with
cryogenically cooled imaging arrays. The frequencies of microresonators are
sensitive to both the mass loading and the temperature changes produced by
adsorption/desorption and chemical reactions. That the two frequency changes
are independent can be exploited for chemical and biological sensors which are
both sensitive and selective. The design and fabrication problems to be
overcome before such microresonator arrays can be realized are discussed.
>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>>
           John R. Vig
           U. S. Army Research Laboratory
           Attn: AMSRL-PS-ED
           Ft. Monmouth, NJ 07703-5601, U.S.A.

Telephone: 908-427-4275,    FAX: 908-427-4805
Internet: JVig@ARL.mil

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