Hello to everyone,

recently we encountered some problems with SU-8 structures - our
sidewalls are bowed towards outside from SU-8 (instead of having for
example cylindrical hole in SU-8, we have something with smaller
diameter in the middle and normal diameter on the top and on the
bottom). We are using X-ray lithography and are starting some
investigations of this effect. Is there somebody experiencing similar
problems (even in UV-LIGA)? Any ideas where this comes from? Our
structures are from 500 um to 1000 um high and our minimal feature size
is about 30 um..

Thanks for any information

Greetings


Josef Kouba
Louisiana State University
Center foot Advanced Microstructures & Devices
6980 Jefferson Hwy.
Baton Rouge, LA 70806, USA
(225) 578-9371 - Tel.
(225) 578-6954 - Fax.