durusmail: mems-talk: Grad student seeking help....
Grad student seeking help....
2002-10-31
Grad student seeking help....
Clinton Miller
2002-10-31
MEMS COMMUNITY,

I am a graduate student at North Carolina State University working on a
project for my Technology Commerialization course.  Our team is
currently looking at using an MSM (Magnetic Shape Memory) alloy to
replace the cantilever and magnet switching mechanism in MEMS switches,
most notably in RF applications.  I have attached a brief "memo" {pasted
below} about our idea, and would appreciate if you took the time to read
it.  In the memo, we have made quite a few assumptions.  If you read
something that you would tend to disagree with, please let me know.  In
our research on MEMS, we met with a professor here at NC State
University.  He raised the doubt that the MSM would consume too much
power.  He pointed out the following specs for MEMS switching:

    1) Power handling capacitance
         cell phone application: 1W
         radar application:      100W
         current MEMS switch:    2W
    2) Switching time
         cell phone application: 10u
         radar application:      <10u
         Microlab's product:     ? It seems like 200us
    3) Power consumption:
         cell phone application: 1-5mA(He is not sure about this figure)

How do you think the MSM alloy would suffice in a MEMS application,
given the specs above?  Please provide any additional information,
advice, insight, etc...

Again, this is just a newly developed product idea/thought.  Extensive
research needs to be done, but we are very interested MSM MEMS
technology.

These markets are new to us, as we are graduate students doing actuator
research and product ideation.  We have no prior experience with
actuator technologies.

It may be necessary for us to talk over the phone.  If so, what would be
a number & time I could reach you?  Please let me know how you feel
about these ideas, any concerns you may have, etc...  I greatly
appreciate you taking the time to help.

Sincerely,

Clinton Miller


MEMO

Microelectromechanical Systems (MEMS) Switch


                With an estimated market of nearly $350M within the next
five years, the fast-growing arena of RF applications for MEMS devices
offers a substantial opportunity to newcomers1.  With a market demand
for reliable, low power wireless systems, the use of MEMS devices in
wireless applications is increasing.  Although MEMS switches can offer
low power consumption and decreased distortion, the performance of these
switches has been doubted due to considerable warping and buckling under
heavy stresses2.  In addition, heavy packaging constraints can also
greatly affect the performance of the device, not to mention the cost to
the consumer.  We propose a new MEMS device where the current switching
technology is replaced by an MSM alloy switching technology.



The basic structure of a bistable MEMS switch (Microlab's MagLatch) is
shown below:








            As residual stresses act on the cantilever, it can
experience warping and buckling affects.  To alleviate this problem, we
propose the replacement of the cantilever and magnet with an actual MSM
alloy and base.  Instead of components that are susceptible to residual
stresses, an MSM alloy with a high strain vs. load capability would be
used.  This capability allows the alloy to endure high stresses under
heavy loads, a much-needed characteristic in MEMS switching. Because of
this capability, the durability and reliability of current MEMS devices
will be greatly enhanced.



Under current packaging constraints, great care must be taken to ensure
that no outside moisture or contaminants contact the packaging.  These
outside forces can greatly affect the magnetization of the cantilever
and magnets, switching thresholds, and overall reliability1.  Because of
these rigorous constraints, packaging costs account for a significant
portion of the actual cost of the MEMS device.  By replacing the current
switching technology with an MSM alloy technology, packaging constraints
would be drastically lowered.  MSM alloys offer a low susceptibility to
outside contaminants, thus allowing for the minimization of these
constraints as well as allowing large volume application costs to be
drastically reduced.







The basic MSM switching technology that we propose as a replacement to
the current technology is outlined below3:

A short current pulse is generated through the coil, causing the MSM
alloy to expand lengthwise.  As this alloy expands against the
stationary base, the extension will cause the base to bend towards the
electrical contact.  This bending will continue until the contact on the
alloy has completed the circuit by connecting with the electrical
contact.  A reverse magnetic field would then be applied to open the
switch ("break" the connection).  As with the current switching
technology, this proposed replacement would also be a bistable
technology, thus resulting in a low power device.











[1] Bogatin, E.  "RF MEMS Switches and Their Packaging Challenge."
Technology News; Assembly and         Packaging; Pg. 44.  August 01,
2002.



2 Peroulis, D., Pacheco, P., Sarabandi, K. , Katehi, L.  "Alleviating
the Adverse Effects of Residual Stress        in RF MEMS Switches."



3 www.microlab.net



ÿØÿàJFIF``ÿþ
Software: Microsoft OfficeÿÛC








#%$""!&+7/&)4)!"0A149;>>>%.DIC;ÿÛC





;("(;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;ÿÀ‘®"ÿÄ
ÿÄW

!1"A2Q”â#TUVaq“$3BR¡±Ñ6Sbcrƒ‘²³45uÁÓ%&CDEdest‚Ò’´ÔáðÿÄ
ÿÄ1Q!1AR¡"2q‘±3aBb¢ÑÿÝ(ÿÚ
?öZ(¢€)2)k¹µÆÙ®¨¢¹Í ?];¢’–
¢Š*@QEEÚÝB„©igJA>‘Æp?@4”QERdR×
¶t™¤Í&q×j‹ƒº+ŒãƂ­é}ÁÝÆ¡]Ô¢ÜQRŠ(
(¢€(¢©†\/ô’ÑíÍò .¨¤ÍÑLvؽ·°ö¦{W/›ÈÖ9š3Zzã;g¥=šh¤Í&¡ë :¢“?e
ŠçPõRæ€Z)3Fªh¤Ïè¥
(¢€(¢Š¢Š(Š(
ã5Ýqà6 1ÜwŸ}PÑ–TiÈÀǨýuŸcʵÉ8íøÎQJGï­½÷
-œ@¶Ýš‡
¤¥+BÊH¬ôŸ%VõÙ§ÉAþ“J‡ìÇ#fÍv/#èh§ÂøʆüۜÇò­oPÄ«t”
èÊUûH«8þQxqìjë$ø8Ñý£5˜ÉUÅ?è÷î]*OïªÉ^O8Ž6Jc6ø
-:?ߊϋPÞ©s³GƒJŸ,–õ=EŽ&±ÉüUÖ!?š^H?ÜMX¢K.
¡Ô(z¯ †¯‘•ñ–©c
)h¨x*L;ªz3ƒÕ”úÅN©éõ4‡`?ø¦Ocè}C®EàÑø¢ýñwyDÎp«öÕ¬o(ÜEe¼ÌŒ*ßÿ
UÒ­Îwü9TŸB¢žÉFq^^ǕiÉ„[Xsÿ-e·5hǕ[b€í0d¶›¥CöŠÑ*#^ç
˜5s:²ÿcyš¤½Ÿù[‡°íÿö¯ÔÞPørFf)¥PýxÅ1~âxÃï¶ï9±-ojoq§ò3ŸµU»
×/%<É⒝/*eOìØfŒÔv$6óIy
*ÀŠ{#×C4[¥Ðë5˜ræçð’Dgný•m>Ú#Áå¡]©²”/N9‡u85¥A)ђ•gJSŸ\éßq·\ՑmؓÎQÄ··_ûy
¯—• $®*Œ–RKz[PK§-©N(wrGUs|—-‹¬öß¹-ã
ß9–!
žÑñ1݆Œ+Ó;6m9ü­^ŽGÔ=tiʆ¶IRýæyÏÂ×x‹[1&E„Ú$Ê["Cº;S¦[à
'–µ;€”÷[Ò®þ2u'³n7èï΋ç 6ô° €®Ð
%\†ô
L­;
þ¾9‚µDoK£½õUTUè
%¾ë{–üH­ß#<܉ihʎ´I)
—–¤ëKM£=Ä0JIʁ$變œoƒöW~5G½¢ÿÐöZL×9ߊMc¦FÕPwš3Q^™
‡â´ã+’ám¡‚u¨%J#êÙ$äú¾±R5
‘‘‘õÔÙAÖE-CTÆS9¨
cœókq   œ¥%!G=6֟·?UL§0%x-šÃy‘ä¹Ë‹6®r‰%fLˆË3t¤¯$(
j:N}UâÊÃ!”
Z
’àHdgÃ#í¯8>FíÛü]§ìì²ÿüº›Íêåoá;xzðô57e„¡·%ÎRZ
.:âŠB0I'Dà
IÅ\Z˜6{œc.ºE¥äÉ·[Q/K¤((-CBœsë뾛˟;w~Ӎ
ÕÁJQ

K©JPÂHRG‚H#s¶õo“$Ü#D1ËCȄÙi‚¨Ru%ÈN®Õ¨¤xN<1@6÷)Ž.rä
c-ð‰¸%mÇ
ˆsVÊ ­ =t’q×ՇͿʚË×Kåºcksš„†ÃOÆ+ á)*hD’H

e˜VY3Úa
q†΀TFAÐFĨêÎØ©Ñxžàõ߀á™èR®°
‘= ”js⤨ŒwAXQÛ
ÙV‘8bë ‰¬32Íʸ>ãò›]±å¥Õ¸Y!RÄ
ÓꪻW“o&G›oU™‰Öµ4ïÁò
Ztœ“$äc 9$Œrk㉸ŒC»'ˆ-Ð"ޛ”†-Î4žlbŒ¥
kÅ吥jÀ·¤á[ŸÛx7‡'âžfï|j9eqÒTÚëÜÐVrTV¬
Ç¯­kcð<˜œ@íþ;¶4\žÉ[âØöÄõ!=£    '2rrw9‰æÉ®Ï6(MŒ59ĺóbÝ
i* §ðžæ5(wp0Hé@WñÞ"£ŽWn¸£M¡PQ
Hmµ†T²èèrsAÎ𧸖ùÅ|9Ýlzrå\®ï¼ç:ßo**”’ÓL’9ƒ'ÒQ̜g¤Æü›r`L·´lÍFž–Q!´[ä°×¡ÒV
A
I“¹$ïVw®ºñ
½P.Ó,òc„ªÖêH#¡HÈ8$dcÄxÐpEÚív±/0dƒÃêg\˜å
È@¥ÞYôIp      IǨi«?¼N¸–6pÉ
--'?Þwq´Í†«KreËi‘„-
¤ †ÔOÛëØ״׊ù^½\m|g
å­¤¦
Jp”¯SÈÔ
t¨Œýž¡]‘*If¯S›ª’ºÖKï®Nsi¶®²ÒãqÐAJ
IßJFÀõçƛgŠx’7âïÓvþP¥â½k†˜noY)´ÈZíì)Jxj$–ÒI$ÓÒ8NÁ%8]ª0úÐØOì®9:ºíqêÑbQ@ئ
†öK\òáÏx_žöv?áÔ¸üyyHº\õ¶#ÚÁ­»þLø}ßÅ¢CÔw?âÍUÊòSY1.N øsPû1Xå©N磨Á$NlÊ-
³ÊM¹ˆá©Ž\¤,’K!œãÕÜ        ýwørAÀœ[>§SúÎՏÉeÝ
<‰q]Îԃû
UÉàN$ŽN @ü¦ÜIÏëÍGtêh0y~‰mêz/
Þ ;[äÃ
¹Ïè%àIJ–VŸ
€,ÑZD¸
ú+
û
|ú«
â,—öÉhI²¬n=xú«–fL„pėã‘ùŽՖ©[Õ¦mÀ*^9S¹ô5&~ºð¶8¿ˆczWÔ?¤!´µå2þÆû3ÿùœþ£
R•lîbÿ‡*Ûôª)»¼Û
‘xSîZ>ml!¸§˜”v7B–T½D
7M÷›]ΝÔæšëÃ×LMe‹gá«í
Éڛ
©·èiZµœkke‘ËØìœÀcʳàâM­

%·0¸÷Õ¤*6g?

SGĔ¤Ûþêée\}”à“­«rW
¥ž*
&
•Ÿƒã¼Êô2ÛIV—ÂÜ $n
˜$û‰ÆtŒV±Â÷¦_pˆŽÜkðÖùÊZ^iJRÒ´R’òŠŽ¥éÔJµ–Î&µÞXô”àŒN'AI_ØjÒ$–æÃb[D–ßl
8°ŒÛ[¶eTº
kØæ9Z䲙xD³Ä–ëƒ\8˜L¡©
ã-“
žYI)
! áݛϦIÁZ«aIŠZªºåDÅbï°½Xaܯ¼;-ÍS"4¦žåÈSh2Н<À7J’NGóˆõÖÖ£¼ËO'KÍ!Ä
%XZs‚’“¿¨àQ
º¨1w6\±Ü¯r,ËfÝ
ÙefJc3
.)+” “¶‚uj    G#
æT«Åàñ,¤0™,K„x½c&2’´²TVV ésãN;çRì8¯ó¹±šs´7Ê{Zæ#~ê³Ôw•±üãë4Úí
¸7qreÍi:[¦R\@ß`¢2:Ÿë (ï‰qÞ0³GfåðzÞ
0”)ÅáqÕ¥òœ÷sºUÝ
Øu×^.žßF½6ûÉy»K3ßf:K)[‰%<Õ<­JB”’–α
nJ“[„;dÞ[78Ðßçe¤"J®f{å+¯â±üÀ|)n0폩·nQá¹£-6¹-¥ZyÂ€UÓ^BqãœoҀ¥™>àÅýJr[ÍÂnKLŽ
BYq„ëÐ
I<àéRð
NҎڪܥʍjBçµ
˜ö«{å¦ÒÛëx­`iüXÓ
+p­“Z¥Û 9pjâäʚÒt5!M$¸¾ÁDd
Ϗ‰õÐ-p¸ÊLáPÒSA¤å„”é!òvm
šâ·ž‰Å6Ií¸´l¾·F¬ ´§¢¶ásù©BÔ¾¸        '`EVØe\µÎ.?9›•Æè
­–›A‘Ì\6ž[Hç
       ±¯8B4úDÚH6¹s•@†ô³YaÍ
p°¢»§}€ WR-%²ôycºÌ•¼Û%IuCH@Œ4§üÑê 2¶Ûüë¬+zÅÍZS3¤.RÒÒ“
ô¶Žn%*%z
rFR¤Š“Â߸Nnl•ó‘a¶ºêð¥(È$àl7?e[\ø}‹Šc¡¹
†˜ïªBRÄv9¤ç™ñ¯
¨ä`÷‰9¤W
pûŒÇiû,        ŠÊXdÈa.”6‘ÝH*à}f€§¼ßåÁ¾¶#ɐ¶¾        M„°ˆéS
’¢£Í[š¬û£»t¯0¬ïN†Ê`‹Ú££Ÿu˜ì¹
´GÄÊ    Âû©
³­JV4«=‘µk
¶Ù㭧݃®RZŽÒÔÒ”
‚Ûi>XIJ}xÆõÃ0ì2][lE·ºãr{ZЄ6¢—õ)<ÒEêB†®¹J†r
@^ŸñyœÄÝ,¦õ
F
§KœÖⶢ¥
‚ÁHNœrT'í¹òÅ¥˜6¹¥°¸Òc4¸í'TH
M­@‚H98תU

Fhó
KËÊyiÓ¥GÖF”àõG¨Sù 3»uÒÃj¿J“6¥Ë’ô֜ê‹,ji8JÔ@:S§#
ÐA»­Â
T¹2§~óÉbàÔpçgt­²²ã=ÀÚN\é‘ÉV¢ F¸ïújk5²$7 E¶Äb#ÄóXm”¥·20¬¤

·ð 1“o÷¹|==™1×Ö-ò¦¾a+µ0Ó*B“€ž)ÉôŒEäw”-£:=ú盜–þ¾¥‚™H‚—»™Aî¥
à®èüì¨ëÝ
þ63.
Ö€yŒ÷Už©ï+c·xúÍ4õš×'´‡í‘
íš{O1„«£ÑבÞdžsŠÿÑÕ\¦NbuÞï
èÑìvÓ
£´’‰jI’¤Œ’¬4prÕ¸ÂÆ­ÝEv
W‹ÜØ­9Úå¯×]QK²‘Ž”ð"É‘—G©h
ýµ.Š*"„UNŠQÈàÞ’]ª:süšt~ÌUSþL¬þ,ÊcúŽþ kcIª‹Wª
qÖÔÇôÈ¿“Îäù(lïæ´ú¹­
~ÌU[þK¯HÉfTG@õ©I'õÛ^™&æÌGkJÔ¢3ÝÇï¬ÁºqJ
x·*Ö¶KŠ-!ØÎjÏw$,ŸQ¯6jŠ.W9ON,[NhëýÁ8re’,æ®
-õ€­@¤'ÿÙ«¾Y_يxAd´
úé›uòQŽEÎ;)t(ã³(©%8÷±ƒõoIŽ–ìñà8ڐë)P±Ð(ã¡õVÐVS9‘½O2©ÓM#¥‘9© ¥®I®«¼ä
Ì͒”ñzX—:Ld†XTÚY
çãá
làÒՐt$ê=*ÓT)7(ŸŽÌ¹Ñ£»%z#¡×R•:­†¤wÖ*A–1nqd‰ï9rUÊSsb*W.*yÜ¥s†ÒtÇÂÂFu
γª5‘Ûƒv»R“wœ_¸ðó²]}Щ*K©K
Kxܧ˜¡¥#+ÛV¥o[#s€™ˆ„gGV¥!,óS­JJBˆ      ÎI      RTF:|EEsˆ-hb
´Ëiس\[h”Ó‰SIÒÚÜR”¬ãH
(¾^Ç3rya†­×›
’¡Ï‡9Ë« öI$iR†¥¬!E­ÀÃd
¨×Ÿ
/‡¤sf«²G¸@qoǽ»*:”«ð
iPP©$éOŨ`œÖíw›[=™q†ßnÇeÔúGhÎ1£~öuž±MO½@·ºÛ/HB¤©MÂ’àKŽ¥¤¯Ns§Z€'ôo@Q@˜SÆ
Œ¹Ë’úÞy+KSœÖÚ0¢ìU'KM¤¤:Öyg8pçŽ+š¦&OJ§½
ö­¨rÎÚd)¾Ñ+.å)H
½ŽÛT™Qd!‰£0êԄ!·
        R”²t   ܝ*ǯIǍ‹â6Œ©fÜeª$wmRœyé‹J’µÊR
YX#HҐtŒ!$e)I¨¢uÁ?Â
¼µº•4ږ·”,ü%-
ˀÚCyÇ F1[ÕÜ 5qnÜäèȘòu·N§˜´ï¸Nrz
ž£]³24—VÜy-<¦ÿ–Ü
)ï)'#;aIXûRGPh
C3îñ-féK3P‰.FŒÒg9-Œ8ÒCcš°’éí!)Ւ
ZI'J©Ë„N(M´\räyYŒ©W'CïGk˜®Î”½œ¼
§¡Ôrž^FÑ7(+bCè›mDR‘!ÀòJX)ÝAg¢JG\ô¨Rx’ÚÄÏiäLŠˆÊÅuµ
¡¬„÷·98Û`F     ?
9¥‰%Ïy×e\e²Ò{!!½¥OԔ¨øœºRixþêí»žìw
Dˆð”ôp©®2’±¨å¶ÛJ»ANV•÷$à)F¶OÂbKñÞuœŠáu“’4(¡HÎÝ{«PßmþÊ|Š)rÑrºOå•F½ÂŒÃ<ãÊB
R±£¢²
W¥'t„’IÚÓzwéê§(Š( )8ªüxk‡d݄~ÓÈÑñZôjÔ ž¸?^}çÍGG¶{•¯òšË²8âÛ-­Ç+BI'ãQà+Á>¹
üÝ,b¯Ý_OƒPQTBçTu¾öì†29ȼLóæ¿££Û=ÊO>kú:Ÿl÷+Í>¹üÝ/îû¨ø
éãm–?°Wî¯kü>¿ýŒø=/ϛŸGG¶{”Ä¿,­NŽ¸òxe·sÒI˜~ÐGsbàŽ‡~µçfÏt"Û,ÿ`­ÿUl<ضFG±ìÞ
ýyUÍÀè\ÖË~{]F‘¤¯½»<³É„Ú›vЩMñJr_}   õ(èï}¸Î:“Rüù¹€ƒ©Ç¯¶{•æ‰´]Û%ƒ‚qÈWî« 
J»O\y*vÚÒZ.s^`¢FHßrzøVÕ˜L,ïæßéyþjÈåʆïϓŸGSížå'Ÿ7>Ž§Û=ÊÌ]¸VÛc²ã]9ÖÊpÃqûÊ
ʀÛ
=3žž›ø
çót¿¸WîªPC‚×5]ùr檟±'5²ž—çÍGSížå
|×ôy>ÙîVJÅÀîÝ¡¸ü©Æܤ:Pz9ʆun¡¶øýÍÿƒdY—²H]ϝ«_%‚9xÇ\×?ª¹šì
õ:TEÍ{w·ä¶Iræìlüù¯èèöÏr—Ïšþl÷+Í>¹üÛ/îUûªÞÁÁÒ/
’%¾»`d#O9‚yš³œd§¦>¾µÛYIƒRB³IÓú[û!F,[!³óæçÑÑížåaxç‰UÆW–®B†[Œ–9|Ý}¥g8
ú©ûÿ¿gTnÈú®|ízù1ÈåãÎ
ëŸÕUÑs#ý[+îûªÔ4øELi<+dçÕmûq¹\o¬þXUi²A¶‹{²FmŽgjÓ«B@Î4
t©¾|Üú:=³Ü¬]ƒƒd^ K»`d#Iy‚yš³œd§¦>¾´õûœ´Ciø“þZÝ
–YŒB€ÒN­”vÛ¦¸
ü       µZW"æõ·ä¾IU¹ûß>n}
O¶{”¾|×ôy>ÙîW™üsù¶_Ü+÷V’ÓÀ+¹Û™"ê ºáVc»¼œ(ò |3Óƺk¡Á(˜Ž–üöU_ÑXÒYÈj<ù9ôu>ÙîRy
ósèèöÏr°×Εhœ˜Ñ”íŵ4Îf9À9#NÄï¶MVEÐE¶YÀþA_ºµ§£Áª
IÙÑw[/à‡,vU=3Ϛþ'Û=Ê<ù¯èèöÏr©<Ø·ô‘Ÿfñ+
›EФm”?Wî®jàUÎsa¿ËÖ÷OÙg¶V"*ŸÿґçÍÏ££Û=Ê<ù/èèößr¼ÍV‹ I"Ù,à ¯Ý[
6-ý#gÙÇüJúºæàt*ԖüöºþŒXÙ^Š©Ø›/Êÿkx9ðOt;g×ýJcηþ=¯Ü¬„»Æ<·˜D9/!§TÚ]K
        X
Æ¡×c×­1ð=Óæép¯ÝWoØJqU©ÏŸRڙÙòÜÛyÕÿÁµ{•"
•þÈ÷3à®éíŸ_õ+ð=Óæép¯ÝGÁO›¥ýÊ¿ukÂø
nGµ©tÿ‘ªÉeSèÞ¾ž$áè×s³vyk^½:TS×ó}UwY/&l»€-­<ÚÛpsr
§|jü
kkäªÖNö3¢*ÛòhÕºcx–Årr—È3•å֘®0²Ï4º’ ’
ضvVÙӝ•VO½Û폆e:´¨¤-e
­ieún‚NÊï/º£ù'’QÜ8qÙfôoi߄.Н:Â:;}ŸPVz¥Þéúðwâãg¸|,f¦Ö‰­¢ø‰¡¥¸©´Â
êN(8qÞtŽðÐÜ®ðlèes_åÝå4T¢µé*       JŽ“Ôœ’@,¹Ä6Ö¢±'˜ó¢F­
±Ç]îœ+-¥%CJ»ªÈTppN(
‹ü1yP˜
'%«³¶ã1
ŽoÈsKÊq*)2ËZˆ!~—w6—KL×.2M©rÓ&ñàÔ¤©­Òß!+'R‚‚´´¿D
”‰ÞGÙ"¨¥Éè%1;n[Jœ
Œ(óH9Gpïë)
Tœ§ð¶ÅòãëüRÿü·OÄÿMø¿çP›·
Ü®“kE¯"MÅÄÜ\[|‰
ÈÂGx¸;ζÝ꟩ˆ³]$±2k­\
’§!)(žänk‰aþqJC  dR·Q é¢fùo~áؐòùº”€¢ÊÃkZs© p
P²”’F•mÝ8bÙnQËñ®,9üצÛS`¥(Br°{¤áX;P
ðÔ7ã»wåµvÔ͟ÏC
-êÁi¤©G–¥'%iY뿏Z§âRgqî
Ksr
™cfZRcó dçþ`U¤•wS„«Âìñe™¦Âޒó
S¡¤´üWZuJ)R’£«B€8ŠJFNÔ­ñ4WïpmÑÐó‰›׃Á•€‚Ú’’
wp“’  H) $Œ¨PSmwÆïå@aHí2Ô[}
0
±
#*q*    kSKׄ•å Ö
8zI‰RŽC‰žŠmE8Z2S•§RR  8"®Øu/²ÛèJÂ\HP!HPÈÛ);ƒõš¨“Ú—"k
%aPß
¸UŒÐæßV?NjeS'‰í
fKý¥if3*’¥©‡•´‘•8Ù)øԁƒ©‡y?œ)ÆøŠÔôgä·/Sl”äòÔ
Ž¤
ead‚œ
““@Zäzéj¦Í{bögÉËpäˆáDœ¨òÛYÊH$””ÁIÎÂڀ(¢Š£‰¿ÔöÿˆVrÉ4¨êRØSŽsBFrSŒl;‡)Î}
"1Z
)q
p쥸°„RŽïŠóÞÝÖÙûÁáÓƪª‰Ü”k—š!ª‡h†ûЂç6Vòd)$àPÇՍ†iÕÏ)¸Ý­‚–Qnm]¥*Ðudwr
NŸïßzÈvè+däÿ();|?–1ý ðéû)»–á¿cn‹|8Ȑ¦á·ÍSN¥¶ÖV¢¢IÕ·å$ÕYƒrí±C
¶$0‡▬©D
ƒ¾0qÓ©èëYÞÝ
ø[Jš;t3Â˜ÛÖàÈýtÌÕî2=;{öøLÚ㲆A×Ú[ùÈSI9ï
’Sƒ‘¹ f«o0cEd–¢ºÊƒê@*
H
¢¢OOH`Uo‡ò¶~ðýõÐgCÛ2ÙûÁú|v¢=º‘Þ#ôT~ßål}àýôvø+cïȉԜŽÙI¢Šc·CùS?x(íðþVÏÞ
#ڝÜd~ÞÃôS
ºÊØûÁIÛáúÛx?}3·²ŒØ‘ÒŠÛáü©Ÿ¼½¾ʙûÁEs{¨F?aú)ŽßåLýࣷÃùS?x(¯j÷
°ýÇo‡ò¦~ðQÛáü©Ÿ¼Îޗ
Çl?E1Ûáü©Ÿ¼vø*gï3¦ä+
·°ýÇo‡ò¦~ðQÛáü©Ÿ¼Λ“‘ëÛØ~Šc·ÃùS?x(íðþTÏÞ
#Û¹
7mì?E1Ûáü©Ÿ¼vø*gïB9¶µÇ
ÛÑLvø*gï'o‡ò¶>ðS3w
·±è¼4GÀ¿÷ŒÕ½Rð»ˆw‡b©µ¥I:𤜃ßW]UÊ
dø¿‡n¼@Ĉðå¡,¿m%+’ó)egVIKxæ
å)ÂöFœáY):ÊÆÞïw¨™Í2Ê”[KIii.(»(¶±
$'*N¤î¬
)#Ò:@²âFg®UvæÐã¬Ï.
bTPÙÞQ
ˆ9      Õ¾
†Êèk_áIŸO ¥Ù-.ZÜe¢$N
ljPI €¯Hé
•/‹þ†³5ˆ‘f"h„°ôÝ‚Ë<àKÅ       ÐGägQÆ1Þ©
ñ3Nð|®"i”:˜Ì>áCn‚‡
E`éX¤”
+‚q@B{
düt
qҙ6m¬cZBV„¼3ƒ¨„übqºŽÉ>2ï6    W‡¹.4Ÿ„­)„β{«
ü•lvøÔî2v;zڕÅFyÆã     
Œ–
J%%¸[l¸¼aRN¼k       ‚¾”‘x¿·ÃGcb$™ŽM0“É™®2–çd<’C:Æ1Žõßðzê¾*‡rzR
b,·]%Rž%Ä)·”†¿Ù@ZS   XD¤ä+à„§¬°-He¾Eû[®#*ÂÜK)
HÛ rÕ×qõã»çDZ¾’Ôhëj"e¾Ô¹ˆiÝ
*î4
prÔ
u’Œ(ç!ÑÅDÜ&ÇPòbT¨ÌÈJ¦á¼÷Œr¢‚Jµ¶pŽ#[øbcWX—e•3%+pŒ‰ŠRËèqÜ~SވHÇx䒗
n±\ ]¡Éü
ƛUÄ;ñŠ
        ~B]AHÓÞ#@1‰ÆýBâ7&ZfOKVׄoúX—$=ÖuºR’#¼®éÂH)Ô{¢3
d©‘˜0¡Ç›!ہ‚Di©[ùà î‘© Ýw°@
L‹§MÇCÕv‰5QÙ
v}@íÔòW´oêæe’ä£r\g‘‰wÈä¦K‘Ë­ˆí· º€TÙ֍YNrvQċG
¬¦˜LRÛ¢2˜žf{3¡Âß+
×Þmá¨mñyè¡Páñœiœ@›ZLC͐ìT!¤¥mkÔVÖ;ˆ<µaZTl5lješíg¶O´1ødˬ£ˆÒ\@ËÒŒ/
NTÒyŽ

%c®®E†S¿        iS Ê»DšŒ¨ìÛ]ŸP;zG’¬xn7ëŠaÇȁd¶9pv#ªÔÄùfD¤°ãÁi9ä $‡”+»Ý
gsºÌ‘s—¹¢"¹*ur4aâÒ]§IÃd-#Pʵ@š=‚%±d—o<¢âm/[£>äéó5¤'V
wX
Ē”u
jíó%Ê2Z—
³.;‰o!eHs-¡EI%# )JOMô
›”‰Å×Eð¿6D,ÈfÂÝÉùmHHÝHt§H(#Y-ƒ%#*ë¤éXº=.ó&#PuFŠàaçù )Ò硍ѥi
Σèàj 3.ðuêGm[óqÇí2à‡
–òùŽ»£éWu ¢“–Ð0œ
lsu°K›>d¦œds„ZBÉ—
÷
Ò£ƒ€¬¤ddŒ“€5²8ÍÅË1”dÇîG˜‰4ŽÔËN!䁆ׇq€T6VÝí1@ÿÓôË9ñݹɸµ
§gK¥¶
S©JC-¶¥%;å²zxŠ¹¤Å-QEcÊñ*öæ&¼ÊÕ`jánf[Ó
d?90›BY
ÂÈÞoõצùAþ$ÏþÏüÄחBâë8ƒ¦Òâeö”¾´¥zN1€•$àíB¼ê•oæ=JDrnX#ƒ9l%s.Ñb-Ç^mjHF[
VÊ”êJ¶ ŸUu7„"@øS›t}_ryÚb«™èé˞ß8ªvo÷VЉŠÈRԕ¬­~™JÔ
“Ÿ

»õ¤‘~¹KíœùZû/´e        ôz
Ødž+
ñlu$Sߛ‹iÜٝžÄyÅç`ºÂ

ŽR̓%E[‘‘^2v.¹ÀåN;pRYLWä+
¥N$´ •
€²Ÿù]rªgxŽì뒝\Ň&ËËJR’¢ß¢rÆ1á]¿Ä÷‰IrX›u²Ó`¹ºú¤€I럴Ó4[eGgÿÀd7
‰ïÝÚf
®YekB œ’°¥€1Ž‰*'ÕMÃà椮ÞÒ=o¡²ËmŽRŽN­c
¶ÕXŽ(¼!¶íiSqÃa”8ÓkKz3¤€RpFzúoM·ÄVœŠêf,¹
¸YZ’•—=3“Ôœøæ™âØpêW«‹™¼/Î;
=÷oJAqÄê)PkWçwÆ|7=1MÆá(ó›·×7ŠîaîΗc€[Îu³Œã¨ªEþ曛W>ÔLÆP—ŠRTFß#¼pHÉވ×ë”
NÅȕ£°kìøBN~–27Î|sEt{ÚȈîßúY1ÁòdÚۖ܄¥Å©Ëu:@KªÐ•
ʺúÒܤ¨neÇà–e¾f泉˂µ.(V„)DŽùÈîãíS3ėV¢"'i*e:’%(V¤'XÂÀ¦1áSåqœ²ÓH‚ßfq2 ¾
ڔ¥”éè”%=rH'ë«#¡ØÍÍ©EµÇ£pb$ÚxEËD#9ZۚµèÁ
X@g:üzS|O`¶Ù-våÝÛ]§  €
‘§¦¶6õ䓸ª¶/÷HðˆÚH
8Òƒ•d‚=᜝dž)¹÷›
ͽ3e*Hs¤¨`àã l6}UW>;*"lsæErò!Q½¤®c¸]èޒŠQw£zJ(=Eލé(
õz7¤¢ƒÔ]èޒŠQw£zJ(=EފJ\oAcÚ<Ÿù•ûOóZzÌù>?ó&öŸæ*´ÕîÅô!ó#¾áTÓxv<û’§9&B
Ó
)¤h%‡¹­ÒNrTøŽÙÁ5Ÿ“2J¸™ÈÂ∑â3•!%/©ç\AJ‰ß?$w•¾¡Ý­
‡ßáèîºûíɑ
K²Ä´¾ÙAS.rƒ9HRH  ÞÒ$cl:ý©6)‰$:Ô¦\eז°]V°u+8À;“€U<;•ÁwR\šµ·:ç*
ŠPŽ[HkŸ¥I!!z!9Ô¢;ÊØmŠÓ®Òx]ºê·•tá§ç8PÃhRÑґ¤ì°é
ÎwÝ::6sl1gH’úÜuHm„’>,²µ8ÚÓ·Pµç àdxrÀ
ŠÚsœ¹L¾d71EÄ,¤£!:9`h%8эʽ,ª©.—©v˼v۝.J:,ên:RÜåê
É-Ý
+°;»wULÞäK¸p‡:õە̏pB"%
å)aÅ6
3‚
Σ•%†E·mÖgNŠy(Žùiì©öÓ«JTµ,
úûÉPWxY
s‡[~g>Déζ•-Æc©ÐÊ֕%JJÀ
¬VBulŠÇ¦\aޒ—®—؍ÍB#­’V0øp:¥/m
¶¢0+Uš”pÓ.5#µÎ—.Kü¯Âå¥Är–\kJ;«%C)9ÎFÔDሱ
DŽÕ-÷“4ÎRÞp(­ÒÇ$çm“¤çHÀa„€‘yEQhµn2TÛI\É%iKCÐ@
ÎUkpŒ`)ÕõÝEcYjžjl¾G5ÇSZCIZÉ+VÉ
VJ”p¥‚­€ÂqkŠZ®b;X‹p,Dj
¥ 
6JT¢’R{Ëï6P{Ç}†&"ÎÛWg.
ȒžjÎGJÀmnsډÐӝ;§VõgEœ‹ÁÐãÙä[L©n·"ڋj–²a”óq„¨HÎ<ŽI°E¶®Î\‘%<Շ
Ž
€ÚÜÖvÔN€œéØ
:·«:(
Ò8&]Œ£2z“(n;ju:i´âPž€²‘“•H*8N4´Q@QEQEOڕ}±È¶‡y<í?£Vœ(+¦Gª±^i•óÐö_~½+
A
ï%Ä˞#ɖҦ*,H‘Н_T
©ED%$­.nTR–À‰'Ä׭܆ÑÏ$if©”>I•óØÏþ—Þ¥óJ¯žÇ²ûÕªnò^¸ÛžB”"\ìE2êF¶$µ­^`rÝJŽT2”iØ
’^¹½%ë¤KÕAµÀS)`ÁŒZC:[å
!£€Pæ)ۦ¦Ñ@Wü
lK­¸›d@¦›CM«œ¡PR6HP° Ò»6¸
rR•9TĄIQi9} igò†     çcSh +Ñe¶"SSmˆ—ⶎêXH[M€@BN2‘‚F:Ô¦˜i„èe¤4‚¥,¥)jQ*QÛ
ĒIõ“OQ@QEQEEPQ@QEQEEPe×Ãr%Ûd۞
„5qzK&CAæ%%Å)Ì8ÐPÈJP‘Þi+ú«QE—·pö¯m쫙ß&LÂþ„#¼¾bRބà
ŸQÊF+€·kò_fl'Ñtt­¶Üq²â
kÓ­*HRI¥' ƒ”ðT
(±¼§`?"jÞz4µJuDwV¥2¶´¡9î$kÈôܕ¢ÔŽ
yûƒëDÄ"™lÌ}’É.ZåéÒ½@%'’ÞAA>–ã#ôPöøiÄñ«z7¤£©¨‰nC€¤¤6ë
áÆÀ;'H=ÆÉ$¤’Ô>aä»pLm>’—D·ÚIPW2@ÉK®B°
—¾ÚZ(
åç
SrìÍ°¨‘ãÇk”ÚL4©È£ó£¬Z^1ƒÞB0y„{ˆ×w‚K¯¶úÖô;!+BRmÒ{‰î'm$‚VA‚4´PÐ-­òԖî
ø<¾óá€ÇÆ8µ-ANRµRvNç|׳Á¥V˜V鳹ȍj~Öµ²×,­rÀPʕ‚Þ
ÿØÿàJFIF``ÿþ
Software: Microsoft OfficeÿÛC








#%$""!&+7/&)4)!"0A149;>>>%.DIC;ÿÛC





;("(;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;ÿÀh9"ÿÄ
ÿÄR


!1AÑ"2QTV“”£â#aq$%6BRU‘•ã47Eeƒ¡±³Ã35FSbrsu‚„²ÓðÿÄ
ÿÄ2!Q‘"1ASTÑ3CRqá2¡±ÿÝ(ÿÚ
?™QDTʨ©™@UD@DDD@DÊ ©•TD@“MSTèù›ÛHžªÞÙå$
è
.Îæ’ñ£yÂd—OdˆŠLÂ" ˆ€*~2ª§Z¨ˆ€""‹EU´°ÛöŽ¢ßZ
4tNٙO#ÚÂ÷Ê
d{Akm9v”s»6kíºš¶JJ©ŸLèÚ\džÇ        ºŽ%p
q
       5ÇñNØ"ԝ§µ(’¥îsœÞA”s:v:¡
ÖИrZ
ÏÊnvpÍLϬ–)Z
Éà潤dGGZôD@DDD@DDS(
¢¦S(
¯%\ÔÌ©¦)
ó¡ø 3
¸Œ8#–j¸Yí·^L×ÑC;áÏ#+›ô“ìxñ˜íÀå¤@9Ü°»Ùy¡ßn¼s˜Ç
k”z÷
l¬Òæç{ħÞs¨
Ò.vý[t;t©¾×WMœçðZÐ
÷Fæäà·Pi!®ë!ªéÝw¬7m*Êsš~7ü
;ˆ9J´aÏɼ3ÑH¼ëÓºïX.>ÚU›nÚKíØUÕÆ^gLú©þ鑺"n5;yÆFá½QÕ¨¿N]ŽÎGäúú“ê/:ôî»Ö¶
•:w]ëÇÛJ§R¯µ.ÃÑùP¢‘A+ÎÒm-kèíkLìŒÊæó·³
râ¬éÝw¬7m*ZôåØpz?&
×ÔôR/:ôî¿Ö
¶™fÚ6’û}¹En¶Þ®3ÕMó™œã½Äõ£«QyӗaÁèü˜w_R}Eç^×zÃqöÒ§Nëý`¸ûi”êUö¥ÙŽGåCºúž‰9
êTÁPU’õ´;ERi­wʹ§
"}y‰ÎÜOŠ
à]€     8Î:Ö³§uÞ°Ü}´ª»õü¹v'ƒÑù0¡ðHÞ%ÈWº„Áoñ*fú6Ît⟠ý!ÊÇSwäà

¸@};¯õ‚ãí¦[+%ëh6Š¤ÓZï•sN8Dú󝸟=À»qœu£©Q/˗`¶E
“ëêMÔôqQS6š–0ÈٜeĒIÉ$î$’I'$’IÉÊÈh o_*&Ô2‚•’6J–ÄÑ3ÛÁÏnjFáמ
¾ë¡#À’Ãk9)Öªˆ¤€ˆˆ" ˆ€""­s±æW+
œõîúÐͺP¾ºJVÓ:®&꒜JÓ#íå¹ÈÇë
¯j­tö×\ ©Š¶ršK3½‘ºBŒ2í-à2wƒÃ$kåÙêúšÛL¢³º©ñÕ;Såk¦2
Ì –ò„j9î·a]öVï{ÔJ(©ª$„À"dÏ{T0;V†œ—Ô
;ƒs“œ
aêÁÚµÙùÕAʵƒ
Ǚ\^ ª")QL¢ 0ï
õ²×[¹^HÕÓI)§VM-Î23Œðʇ®ÝÆé,vÙnW=®Rç\ís±—Íyìùƒ_ûcR=Ib
ˆª!dÐHÉbeck‡œÅ}Fõ   3ºÛé«ÍM
S¶GꨧçyŽSçGŠï¬n;ò    [ÝÍÇÉÙÑösϑCÙ©ãLHõ%ÄQ'‡9=]o¾|‰áÊOW[ïŸ"ž
푩
¤¶Š#ðç'«­÷ϑ<9¿ÕÖûçȜÿÛcR=IqGáÍþ®ƒÿyò'‡7õìè÷ϑ85ÿ¶5#ԗ
Ýgø¶ºý°|ÅÊxs«­÷ϑj6¯º“¶§fªìÆÎ)yƃÊózt½®á ~J´6Eò’n›‘êl»‚î}ÿì¦ÿL+Λ¶ŽØ‡\
·óÃYÉnå´iÑ«ê?”ºÿRôt{çî֗*ö¥YISxd*‘K̗Dž
äõt{çȞ
äõu¾ùò,x5ÿ¶N¤z’Ú(“Ôž®·ß>EOrzº=óäN
íHõ%ÄQ‡7úºß|ùÛý]
ùò'¿öƤz’â(Ã›ý]
ùò'‡7úº=óäN
í±©
¤­SPÊh,™Òß2çok´“Àë4ôÐ1¡Ü°«„¿'vœipú×
UݨÕ@èŽÏ†“Œ
yõÿ¸°|+1{ù•y±öîþ-éòÿGM)ÛãÆÉß|½ÇRÑqŠ‚X:ŸO®77þ“«?¬-—H[Ï9.g
‡“ÔeÔ<¬ãN>ܨ›Â¯ó÷¯‘<+nÿ1Ž
—ò.Xl´©ó¦¿á¤§ièÉv®ÇOr©|ÕÕ5•œi¤3Bь9¥¬ÓÊcx“Xâ æÑQÒÐR2–ŠšZxó¢(c
crrpἓúW±]ÑÎ×^%·w¬RrTænS—ל9­Æ4Ê]Ó7
ßZ
ZÓ¬±#™4ü‹‘f" ˆ€""ÓÖ¼Ûµ«Œ»Wx‘”Nc«§!ÂG(íü¤ŠàŒ1OµÇ3
ö—å­sA''$
élÝ¡+   ¹F9ÊÇ2“†ñ
wžçùº¯Ø;±žè“jÏÙ»í%ª‹Yg$Ýn¤‘Ñ0µåí
É»xŠ)%£¾GKË6<ý
ݒàÇ>09ÊQÛ×1¡¥Sxÿ'çü‡J.Y^Dx;™Dý¢‡=s|땫±\ië'”u2)\ÆÊÈ
‡€HÈúŽ2¤î
?³¹,vÅõ½IJ­G5ÑÿEç˒XþÞÓ³u×
œ4“Å=rj¨’³
'~qæÇé[êÞç"š‚¢¢+ã'|Q9í
”Ã2    ÀñÏÕ"]íkêõõ)ÔpŠô^LB0Œq%’,ï=́›m_±wbúÒX®5@ú:˜,¬Òºa€œ
³¤ä^•O´W¦ááõ2TRyg+[Üé´Ô5ÞÙ;â‰ïlM¦¤ d4açŠå
¢çŒw¶«Ø;±J}yEÅa¶ï-“Õž¦zòÇcJ„Ÿ
`Œi,7šÈ)ßGS%•‘ºW@ìF   ¸îêãÄ.¯Á”G†ÑEõf˜ì],¯v½õÄÔéTtñ旯qB+Y"¦Ú.e
÷¶¯xÏùv-‹ejîÕ2Ûc—òÓ@KI
o-ß¿í°¶Û%¬§ºŠéc-ÄSøÏÀnÏ
çô.lÙî}Vê¿`îÅ*uå6;ròÚ
U–£~¯ú&¥8Éå,
E‹a¥»ÑÉ=U{^ÉKSSä¸`
[Ü7oÇ¥‡|ÙJ»M{ié%Ê7D
f†$‘§q;÷Ç­Hh²§¶o£tëJ¦cû};’á
%̊ûÏsß÷º«Ø;±ol[
-ގIê«»ÚöJX"šŸ%ÃêÞá»y
:—n‹¢÷o]ÜSܦôÞ|×?ý+
q‹Ì¹œ%ûcj,Χ•¹òÁúŒçèñŽ8qãŸêZcg¹þn«öìR¢+Yý º¡Kr§¯Wæȕ%'ˑ÷žéùº¯Ø;±;Ït
ÉÕ~Á݊TEÙø¢·¶»²º+©¨î;AYKµµ/¨¤ž€é#-ëÎ¦¦ð\^ǾÒÿÀ?ù5vƒ‚ð/®åy]֒Ã5ŒwV
¢"ã,DDÿҘÈ9\U~Îݦ¸TË
.XùœöžQ»ÆN:þ´D?Fo
ˆ}«?­:1xÆê<JÎÔD£€Ü©Ñ›ÇU<¬ßý}HˆF/n£à:¤`
ڇfoþäýR³Û½ÀèÍã?Àþ#;S£Cø¬íDBGF/
‡ñYڝ¼zÅgj"ћǡüVv¡Ù›Ç¡üVv¢
¼zÅgjtfñ蝨ˆFo
‡ñYڝ¼zÅgj"ћǡüVv§Fo
‡ñYڈ€tfñ蝩ћǡüVv¢
¼zÅgjtfñ蝨ˆFo
‡ñYڝ¼zÅgj"ћǡüVv§Fo
‡ñYڈ€tfñ蝩ћǡüVv¢ 6Û7g¸[îKUO¡Žˆ´
m;òQú—Nь¢ .DDD@ÿÙ
reply