Josef,


You can find technical papers and application notes on wafer bonding at
http://www.evgroup.com/papers/memspapers.htm

Best regards,
Helge


 -----Original Message-----
From:   Josef Kouba [mailto:josef.kouba@mail.cz]
Sent:   Thursday, October 31, 2002 2:18 PM
To:     'MEMS talk'
Subject:        [mems-talk] Bonding Si to Si

Hi all MEMS talk members,

can anybody give me some advise how to bond two silicon wafers together?
Do I need some special wafers for it or can I use common wafers? I would
also appreciate any reliable and good information source about this
problem.

Thanks for your help

Best Regards

Josef Kouba
Louisiana State University
Center foot Advanced Microstructures & Devices
6980 Jefferson Hwy.
Baton Rouge, LA 70806, USA
(225) 578-9371 - Tel.
(225) 578-6954 - Fax.


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