durusmail: mems-talk: Bonding Si to Si
Bonding Si to Si
2002-10-31
2002-11-01
2002-11-01
2002-11-01
2002-11-04
Bonding material impervious to KOH bath
2002-11-04
Bonding Si to Si
Jeff Birkmeyer
2002-11-01
Josef,

Why don't you try a google search before you burden this forum with
questions like this.  There is a ton of info on this out there.

Regards,

Jeff

-----Original Message-----
From: Josef Kouba [mailto:josef.kouba@mail.cz]
Sent: Thursday, October 31, 2002 11:18 AM
To: 'MEMS talk'
Subject: [mems-talk] Bonding Si to Si


Hi all MEMS talk members,

can anybody give me some advise how to bond two silicon wafers together?
Do I need some special wafers for it or can I use common wafers? I would
also appreciate any reliable and good information source about this
problem.

Thanks for your help

Best Regards

Josef Kouba
Louisiana State University
Center foot Advanced Microstructures & Devices
6980 Jefferson Hwy.
Baton Rouge, LA 70806, USA
(225) 578-9371 - Tel.
(225) 578-6954 - Fax.


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