Darrin, You mentioned using a titanium or chromium adhesion layer..do you or
MEMS community know anyone who is manufacturing Chromium wafers any diameter?

Renie Duvall
renieduvall@earthlink.net


On Wed, 30 Oct 2002 17:31:12 -0500 (EST) DARREN S GRAY 
wrote:

> Dear Changsoon and Bozhi,
>
>       Gold can be e-beam evaporated onto PDMS with a
> titanium or
> chromium adhesion layer.  (See Bowden et al,
> Nature, vol. 393, p. 146)
> You have to cool the PDMS during deposition to
> prevent the formation of
> wrinkles.  Thermal evaporation might work as
> well.
>       Depending on your application, you might also
> deposit PDMS onto
> the metal.  This will probably require the
> release of the metal from a
> sacrificial layer after the PDMS deposition.
> To get good adhesion, a
> surface treatment on the metal is typically
> necessary.  I've had success
> with 92-023 primer from Dow Corning, in
> conjunction with their Sylgard
> 184 PDMS.  I would recommend speaking with Dow
> Corning Technical Support
> if you are considering this option.
>
>
>
> Darren S. Gray
> Johns Hopkins University
> Department of Biomedical Engineering
> Baltimore, MD, USA
> e-mail: dgray@bme.jhu.edu
>
> >
> > --__--__--
> >
> > Message: 13
> > Date: Wed, 30 Oct 2002 10:54:48 -0500
> > Wrom: YLEJGDGVCJV
> > To: mems-talk@memsnet.org
> > Subject: [mems-talk] Re:  Au deposition on
> PDMS
> > Reply-To: mems-talk@memsnet.org
> >
> > Hi, Changsoon,
> >
> > I meet the similar problem and I ask people
> yesterday about it but have not
> > get a good answer.  If I get some answer I
> will let you know.  My problem
> > is to bond Au/or Aluminum to PDMS surface.
> There is few refernence on such
> > stuff of Metal and PDMS.
> >
> > Bozhi Yang
> > Scaife Hall 203, Dept. of Mechanical
> Engineering
> > Carnegie Mellon University
> > Pittsburgh, PA 15213
> > Phone: 412-268-3677(office)
> > email: bozhi@andrew.cmu.edu
> >
> >
> >
> >
> > --On Wednesday, October 30, 2002 11:48 AM
> +0900 Changsoon Kim
> >  wrote:
> >
> > > Hello,
> > >
> > > How can the adhestion of Au to PDMS be
> increased?
> > > If you have any experience in using an
> adhesion
> > > promoter for this problem, please let me
> know.
> > >
> > > Thanks,
> > > Changsoon Kim
> > >
>
>
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