durusmail: mems-talk: TiN etching in KOH
TiN etching in KOH
2002-11-04
TiN etching in KOH
Andrew Dowling
2002-11-04
Hello All,

Can anyone please tell me the etching behaviour of Titanium Nitride in
KOH etchant.
Could you provide references if you know of any.

Thank-you

Andrew Dowling

MiniFab
Australia


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