Hi Kenneth,

Thanks for your mail, I've received really lot of useful information
from many MEMS users and I appreciate each answer. At the moment, I'm
about to read all the papers I got and to sort out information I need. I
would appreciate any contacts you can give me about this topic.

Best regards

J.Kouba



-----Original Message-----
From: mems-talk-admin@memsnet.org [mailto:mems-talk-admin@memsnet.org]
On Behalf Of Kenneth Smith
Sent: Friday, November 01, 2002 1:52 PM
To: mems-talk@memsnet.org
Subject: Re: [mems-talk] Bonding Si to Si


Jeff, The burden is yours, not the forums- there is a delete key on your

computer - last time I checked mine... as this topic that is relavent to

many MEMS users and research entities and better to ask the  voice of
experience rather than fall to the prey of those that think they know.

Josef,
I have a contact that you can call about this- he has current experience

with both anodic  ( no oxide) and fusion ( with Si02) . The process to
set either solution up is quite cost effective and simple with the right

tools.

Regards,
Ken Smith

Jeff Birkmeyer wrote:

> Josef,
>
> Why don't you try a google search before you burden this forum with
> questions like this.  There is a ton of info on this out there.
>
> Regards,
>
> Jeff
>
> -----Original Message-----
> From: Josef Kouba [mailto:josef.kouba@mail.cz]
> Sent: Thursday, October 31, 2002 11:18 AM
> To: 'MEMS talk'
> Subject: [mems-talk] Bonding Si to Si
>
>
> Hi all MEMS talk members,
>
> can anybody give me some advise how to bond two silicon wafers
> together? Do I need some special wafers for it or can I use common
> wafers? I would also appreciate any reliable and good information
> source about this problem.
>
> Thanks for your help
>
> Best Regards
>
> Josef Kouba
> Louisiana State University
> Center foot Advanced Microstructures & Devices
> 6980 Jefferson Hwy.
> Baton Rouge, LA 70806, USA
> (225) 578-9371 - Tel.
> (225) 578-6954 - Fax.
>
>
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> options, visit http://www.memsnet.org/mailman/listinfo/mems-talk
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> Visit us at http://www.memsnet.org/
>
>


--


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High Purity Float Zone and Specialty CZ Silicon  for Power, IR and
Mirror Optics, Optoelectronics, MEMS, SOI, and other Semiconductor
applications. Service in SOI, Polishing SSP and DSP.
Quartz, Glass, Pyrex and Borofloat Wafer Supply. Anodic Bonding. SOG,
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