Hello everyone

We are planning to purchase an electron beam lithography equipment.
Considering our budget, we can not afford to go to a field emission SEM.
What is the maximum resolution (or minimum feature) possible with a
filament SEM? What are the important criteria for the choice of the SEM
(for lithography application)? Is there any apparatus much better than
other ? We are considering at the moment a JEOL JSM-5510 or JSM6460 or a
second hand Hitachi S2500LB, does anyone have any experience of lithography
with these instruments?
I'm sorry for all these questions but your help would be very appreciated
at this stage of important choice :-)
Please answer me in private, I will post a synthesis of your answers on the
list
Regards, Francois
___________________________________________________________
Dr François Montaigne
Laboratoire de Physique des Matériaux - UMR 7556
Faculté des Sciences - Université Henri Poincaré - Nancy I
Bd des aiguillettes B.P. 239
54506 VANDOEUVRE LES NANCY Cedex
FRANCE
Tel: +33 3.83.68.48.08
Fax: +33 3.83.68.48.01