durusmail: mems-talk: Bonding material impervious to KOH bath
Bonding material impervious to KOH bath
Bonding material impervious to KOH bath
David Nemeth
2002-11-05
Although be careful - cyanoacrylate needs water to cure.  Ussually it gets
enough moisture from the air.  If you are bonding two large areas that are
smooth and non-porous (like silicon wafers!), you may find that the stuff in
the middle remains liquid.

Not that it isn't worth a try, of course!

David Nemeth
Senior Process Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA
Ph: (703) 961-9573 x206
Fax:(703) 961-9576

-----Original Message-----
From: mems-talk-admin@memsnet.org [mailto:mems-talk-admin@memsnet.org]On
Behalf Of Michael D Martin
Sent: Tuesday, November 05, 2002 3:03 PM
To: mems-talk@memsnet.org
Subject: Re: [mems-talk] Bonding material impervious to KOH bath


Try Super Glue, aka cyanoacrylate. It works well in TMAH and EDP.  It
can be dissolved it in acetone, though I've been bonding the front of
wafers to chrome coated glass and then etching the chrome to release.

Good luck,
   mike


>>> skk9@cornell.edu 11/02/02 10:32AM >>>
Are there materials that can used for wafer bonding
that doesn't get etched/stripped in KOH bath? I've
already tried Apiezon black wax, crystal bond, SU-8
(not fully crossed), but they all seems to not work
quite well. I would appreciate any advice.
Thanks,
Kevin

_______________________________________________
MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list
options, visit http://www.memsnet.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/

_______________________________________________
MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list
options, visit http://www.memsnet.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/



reply