Hi. I have a problem with a notching from wet etching. I am trying to
pattern and etch 20um LTO line and 20um aluminum line patterned over
polysilicon step. After etching, I see a side notching on both LTO and
aluminum line at the polysilicon step (metal deposited and etched then LTO
is patterned). I check the step coverage of LTO, aluminum, and photoresist
after hardbake and they all look fine under SEM. The notching seems to occur
underneath the resist under microscope.
Does anybody ever had similar problem?
Thank you
Ken

_________________________________________________________________
Add photos to your e-mail with MSN 8. Get 2 months FREE*.
http://join.msn.com/?page=features/featuredemail