Please tell me in what year the first IEEE MEMS Workshop was held?

Thank you very much,
Dmitri Rachkovskij
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  Dmitri A. Rachkovskij, Ph.D.                   Net: dar@infrm.kiev.ua
  Senior Researcher,
  Neural Information Processing Systems Dept.,   Tel: 380 (44) 267-6996
  V.M.Glushkov Institute of Cybernetics,
  Pr. Acad. Glushkova 40, Kiev 252187, Ukraine   Fax: 380 (44) 266-1570
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