durusmail: mems-talk: suitable fluid -membrane for phase change actuator
suitable fluid -membrane for phase change actuator
suitable fluid -membrane for phase change actuator
Saravanan Kuppusamy
1996-03-10
Folks,

This is saravanan, Ph.d student at Louisiana Tech university. I am looking for
suitable low boiling point working fluid and membrane material for Thermally
driven phase change microactuator.

The fluid should have the following characteristics:

 1. low boiling point , preferably 30-45 celcius
 2. non inflammable, or atleast weakly inflammable
 3. chemically inert with polysilicon, acrylic and the membrane material.
 4. Vapor of the fluid should not pass through the membrane material.
 5. Easily available

The membrane material should have the following characteristics:

 1. good elasticity
 2. Shouldn't allow the working fluid vapor molecules to permeate through it.
 3. non reactive with the fluid vapor.
 4. thermal insulator or poor conductor

I would appreciate the help of suggesting me a suitable combination of working
fluid and membrane. my e-mail address: saravana@engr.latech.edu

thanks
saravanan


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