Platinum is a catalyst for the etch.

-----Original Message-----
From: Elizabeth.Conway [mailto:elizabeth.conway@analog.com]
Sent: Tuesday, November 19, 2002 10:47 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] query on wet etch of TiW in H202


Hi,
what variables affect TiW etch rate in H202 in addition to temperature and
low
rate. The temperature for H202 is set at 50 deg C.  IS there a metallic
which
catalyses TiW etch or some other variables which accelerates the etch rate,

Regards,
Liz Conway


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