E Liang,

Try Caynon Materials they make - Gray Scale masks -

Thanks,

Greg Miller
KVH Industries
8412 W 185th Street
Tinley Park, IL 60477
Email: gmiller@kvh.com


-----Original Message-----
From: Enzhu Liang [mailto:eliang@ucdavis.edu]
Sent: Tuesday, November 19, 2002 4:00 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] special photolithography needed


Hello everyone,

Can we do intentionally uneven exposure to the photoresist? Just imagine
a semisphere containing the photoresist and I am going to get uniform
exposure on the surface of the semisphere. This will require the UV
light intensity stongest in the center and weakest at the edges.If you
happen to know this, could you please tell me how to do it or suggest
some reading about it? Thank you very much.

Best regards,

　　　　　　　　E.Liang





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