Hi Bo,

   If you have access to an STS system, I would recommend a 30sec to 2 min
exposure of the passivation gases only which will coat your Si mold with a
teflon like material and make it alot easier for the PDMS to come off.
However, the teflon coat does breakdown after subsequent moldings and will
have to be removed using plasma or HF and recoated.

Phil






>From: bhe063@lulu.it.northwestern.edu
>Reply-To: mems-talk@memsnet.org
>To: mems-talk@memsnet.org
>Subject: [mems-talk] How to remove PDMS sticiing to the Si mold etched by
>DRIE?
>Date: Wed, 20 Nov 2002 14:51:56 -0600 (CST)
>
>Deal MEMS reserachers:
>
>         I got a problem when peel off PDMS off the Si mold made by DRIE
>since I
>did not treat the mold before pour PDMS on. After that, I tried to use HF
>to
>remove PDMS so that I can use the mold again. But it takes very long and
>the
>cleaning is not complete. Can anybody give some suggestions how to totally
>remove the PDMS from the Si mold? Any input is highly appreciated.
>
>
>
>Sincerely,
>
>Bo
>
>
>
>
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