durusmail: mems-talk: How to remove PDMS sticiing to the Si mold etched by DRIE?
How to remove PDMS sticiing to the Si mold etched by DRIE?
How to remove PDMS sticiing to the Si mold etched by DRIE?
Alison Cleary
2002-11-21
Dear Bo,

I believe that Toluene will dissolve PDMS if you leave it overnight,
although I haven't verified this myself. Maybe someone else out there
can confirm this...

Good luck!
Alison

bhe063@lulu.it.northwestern.edu wrote:

>Deal MEMS reserachers:
>
>        I got a problem when peel off PDMS off the Si mold made by DRIE since I
>did not treat the mold before pour PDMS on. After that, I tried to use HF to
>remove PDMS so that I can use the mold again. But it takes very long and the
>cleaning is not complete. Can anybody give some suggestions how to totally
>remove the PDMS from the Si mold? Any input is highly appreciated.
>
>
>
>Sincerely,
>
>Bo
>
>
>
>
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--
Alison Cleary
Bioelectronics Group
Electronics and Electrical Engineering
Oakfield Avenue
University of Glasgow
G12 8LT
Scotland
UK

Phone: +44 (0)141 330 2092





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