durusmail: mems-talk: How to remove PDMS sticiing to the Si mold etched by DRIE?
How to remove PDMS sticiing to the Si mold etched by DRIE?
How to remove PDMS sticiing to the Si mold etched by DRIE?
Likun Zhu
2002-11-21
Try nanostrip.
I used it to remove PDMS.

--- Alison Cleary  wrote:
> Dear Bo,
>
> I believe that Toluene will dissolve PDMS if you
> leave it overnight,
> although I haven't verified this myself. Maybe
> someone else out there
> can confirm this...
>
> Good luck!
> Alison
>
> bhe063@lulu.it.northwestern.edu wrote:
>
> >Deal MEMS reserachers:
> >
> >        I got a problem when peel off PDMS off the
> Si mold made by DRIE since I
> >did not treat the mold before pour PDMS on. After
> that, I tried to use HF to
> >remove PDMS so that I can use the mold again. But
> it takes very long and the
> >cleaning is not complete. Can anybody give some
> suggestions how to totally
> >remove the PDMS from the Si mold? Any input is
> highly appreciated.
> >
> >
> >
> >Sincerely,
> >
> >Bo
> >
> >
> >
> >
> >_______________________________________________
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> >Hosted by the MEMS Exchange, providers of MEMS
> processing services.
> >Visit us at http://www.memsnet.org/
> >
> >
>
> --
> Alison Cleary
> Bioelectronics Group
> Electronics and Electrical Engineering
> Oakfield Avenue
> University of Glasgow
> G12 8LT
> Scotland
> UK
>
> Phone: +44 (0)141 330 2092
>
>
>
>
> _______________________________________________
> MEMS-talk@memsnet.org mailing list: to unsubscribe
> or change your list
> options, visit
> http://www.memsnet.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS
> processing services.
> Visit us at http://www.memsnet.org/


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