durusmail: mems-talk: Shadow masks
Shadow masks
Shadow masks
SERGEI V KALININ
2002-11-21
Hello everybody
    I was told that the way to make shadow mask is to etch it out of thin
(20-50 micron) stainless steel membrane. How small can be the features
made this way? I will be very grateful for the advice on the
appropriate etchants and processing. Also, are there any commercial
vendors that produce them?
    Thanks in advance
    Sergei


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