The first IEEE MEMS Workshop was:
1987' Micro Robots and Teleoperators Workshop
Hyannis, Massachusetts, Nov, 9-11,1987
IEEE Catalog Number 87TH0204-8

more info try:
IEEE TAB Products Dept.
Attn Mr Mike Capaccio
445 Hoes Lane
Piscataway ,
NJ, 08855 - 1331
USA
Fax: 00 1 908 981 9667
Phone: ++1.908.562.3900

-regards, as