durusmail: mems-talk: refractive index of silicon nitride
refractive index of silicon nitride
2002-11-22
refractive index of silicon nitride
Brian Semak
2002-11-22
Hi All

I am loking some data of the dispersion of Si3N4, that is data (a table would be
nice) on the refractive index  n of Si3N4 vs. the wave length found by
spectroscopic ellipsometry. Does anyone know where to find it, or can give me
the data

Kind regards/Med venlig hilsen

Brian S. Semak, M.Sc. Phys.
R&D Engineer
Hermetic Packaging

Hymite A/S
DTU, Bygn. 325, 1st floor
DK-2800 Lyngby
Denmark

Telephone(Direct): + 45 4525 9147
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E-mail: BSE@hymite.com
www.hymite.com

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