Monday, November 25, 2002, 9:16:04 AM, Ed  wrote:

KE> Hi Patrick,
KE> KOH or EDP works very well for wet etching, How ever should you chose EDP be
KE> very careful the fumes are extremely toxic.


Ed,

KOH will attack SiO2.

Beverley Eyre
Jet Propulsion Laboratory
Micro-Devices Lab



KE> Ed Knighton, Process Engineer
KE> Constellation Technology Corp.

>> -----Original Message-----
>> From: Patrick Carlberg [SMTP:patrick.carlberg@ftf.lth.se]
>> Sent: Monday, November 25, 2002 9:48 AM
>> To:   mems-talk@memsnet.org
>> Subject:      [mems-talk] Etching Si with SiO2 as mask
>>
>> Dear all
>>
>> I am interesseted in etching Si with SiO2 as an etch mask. Does anyone
>> know of a dry or wet etch that can be used?
>>
>> All comments are highly apriciated
>>
>> Patrick
>>
>>
>>
>>
>>
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KE> _______________________________________________
KE> MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list
KE> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
KE> Hosted by the MEMS Exchange, providers of MEMS processing services.
KE> Visit us at http://www.memsnet.org/



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I grew tired of meekenss when I saw it without effect. Of late therefore
I have been saucy....  B. Franklin.
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