durusmail: mems-talk: Rough edges in wet etch
Rough edges in wet etch
2002-12-03
2002-12-04
2002-12-04
2002-12-09
Rough edges in wet etch
foo foo
2002-12-03



dear all

I am etching a thin gold layer about 10-30nm thick with a wet etch, KI. I am
using PMMA polymer as an etch mask. My problem is that I get very rough
edges, by that I mean uneven edges, on the metal after the etching. Does
anyone have any ideas why this happens.

Regards
Patrick

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