durusmail: mems-talk: Through holes (vias) in quartz glass 4 " wafer?
Through holes (vias) in quartz glass 4 " wafer?
2002-11-28
Vincent Schneider
2002-12-02
BERAUER,FRANK (HP-Singapore,ex7)
2002-12-03
Wesselkamp, Carsten
2002-11-27
Anna-Sara Hedman
2002-11-27
sp
2002-11-28
Erik Jung
2002-11-27
kirt_williams@agilent.com
2002-11-28
Vincent Schneider
Through holes (vias) in quartz glass 4 " wafer?
Wesselkamp, Carsten
2002-12-03
You should contact Plan Optik GmbH in Germany. We are producing glass and
fused silica wafers with and witout holes / cavities on wafers of dia. 1-12
inches.

Best regards,

Carsten Wesselkamp
Plan Optik GmbH
http://www.planoptik.com


-----Original Message-----
From: BERAUER,FRANK (HP-Singapore,ex7) [mailto:frank.berauer@hp.com]
Sent: Monday, December 02, 2002 5:00 AM
To: 'General MEMS discussion'
Subject: RE: [mems-talk] Through holes (vias) in quartz glass 4 " wafer?


Another low-cost quick and dirty method is sandblasting.
It can achieve down to 150um holes, but the edges are ragged
and not very accurate. It works well as ink-feed holes for our
Inkjets, but is not much used eleswhere.

Greetings,
        Frank Berauer
        Senior R&D Engineer
        Hewlett-Packard Singapore


-----Original Message-----
From: Michael D Martin [mailto:michael.martin@louisville.edu]
Sent: Thursday, November 28, 2002 1:10 AM
To: mems-talk@memsnet.org
Subject: Re: [mems-talk] Through holes (vias) in quartz glass 4 " wafer?


You have three options:
1) DRIE (Deep Reactive Ion Etching): This option will require a nice
thick resist. You can contact STS in the UK.
2) Laser Cutting: You can contact Lambda Physik in Germany.
3) Micromilling: We can micromill vias down to ~100 micron diameter.
But we're in Kentucky.

-Good luck
      Mike

>>> Anna-Sara.Hedman@acreo.se 11/27/02 06:41AM >>>
Dear Sir/Madam,

Do you know how to make via holes - i.e. holes through
a quartz glass (fused silica) 4 " wafer, 525 microns thick?

Or do you know anybody else who can do this (in Europe if possible?)
by laser or ultrasonic drilling? Or any other technique?

I need to have approx. 160 holes in each wafer.
The wafer is covered with photoresist (or other masking material)
to mark the location of the through holes,  but also to protect
the bonding surface on the other side from mechanical scratch ...
The hole location is quite important...

I'll  be happy to hear from you soon !

Thanks!

Best regards








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