I am looking to have about 50 wafers (4 inch) coated with 1.1um +/- .1 um
of LPCVD SiN.  From the literature, this seems possible if a silicon rich
SiN is used to reduce internal stress.  If anyone knows of a vendor that
can do this, I would appreciate the information.

Thanks,

--
Dr. Kevin M. Walsh
Electrical Engineering Department, Speed Scientific School
University of Louisville, Louisville, KY 40292
(502) 852-0826

Internet address: kmwals01@starbase.spd.louisville.edu