Jeetu,

Most of the answers can be found in "Silicon as a Mechanical Material" by
Kurt Petersen

http://www.ee.ucla.edu/~jjudy/classes/ee150L/papers/Petersen_Si_as_a_Mechani
cal_Material.pdf


Loren St. Clair
Advanced MicroMachines-Goodrich Corp.
Tel: 952-892-4610
Fax: 952-892-4948


 -----Original Message-----
From:   Jeetu [mailto:jeetu_iti@hotmail.com]
Sent:   Monday, December 09, 2002 8:13 PM
To:     mems-talk@memsnet.org
Subject:        [mems-talk] Si - favourite material for MEMS

Dear friends

Please tell why silicon is the most favourite material for MEMS fabrication
so for.

Thanks,

Jeetu

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