KOH will etch partially crossed and fully crossed SU-8 at 90C. It leaves
soap scum like residue on the wafer.

Kevin Kim


-----Original Message-----
From: mems-talk-bounces+skk9=cornell.edu@memsnet.org
[mailto:mems-talk-bounces+skk9=cornell.edu@memsnet.org]On Behalf Of
aslam muhammad
Sent: Thursday, December 12, 2002 6:34 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] SU 8 PHOTORESIST


Hi all

  it will be a great favour if anybody let me know
whether SU 8 photoresist withstands in KOH OR TMAH (
at 90 degree celcius).

thanks in anticipation


M.Aslam

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