Lucia,

Try O2 plasma RIE.

Sincerely,

Robert Dean

At 06:15 PM 12/10/02 +0100, you wrote:
>Dear all,
>
>I'm searching information about the different technical possibilities to
>cut holes of 200 micron diameter in Kapton film.
>The profile of the material must keep a good quality.
>
>Any input is appreciated.
>Regards,
>Lucia Beccai
>
>
>
>--
>----------------------------------------------
>Lucia Beccai
>CRIM Lab
>Polo Sant'Anna Valdera
>Scuola Superiore Sant'Anna
>Viale Rinaldo Piaggio 34 - 56025 -Pontedera (Pisa) - Italy
>phone: +39 050 883 488
>fax  +39 050 883 402
>http://www-crim.sssup.it/
>
>
>
>_______________________________________________
>MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list
>options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
>Hosted by the MEMS Exchange, providers of MEMS processing services.
>Visit us at http://www.memsnet.org/