Hello Li Gang:
My experience has been that a parylene coat will protect a wafer pretty
well in KOH. It isn't attacked, but it does peel. So, you really can't use
it for a mask. But, if it's all the way across the front, it'll probably
resist peeling.

Jesse Fowler
  UCLA/MAE Dept., 420 Westwood Plaza, Room 37-129, ENGR IV
  Los Angeles, CA 90095-1597 | (310)825-3977
"Never worry again about the quality of your random numbers!"
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On Thu, 28 Nov 2002, Gang Li wrote:

> Dear all,
>
> Can parylene be used to protect frontside of the wafers when
> you carry on etching trough the wafers from the backside?
> Any information will be appreciated greatly.
>
> Regards,
>
> Li Gang
>
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