durusmail: mems-talk: Anyone know a good nickel etch?
Anyone know a good nickel etch?
2003-01-09
2003-01-10
2003-01-10
2003-01-10
2003-01-13
Anyone know a good nickel etch?
Carl Arft
2003-01-09
I'm trying to pattern nickel with photoresist.  Aqua regia seems to etch
too quickly, and leaves some nickel un-etched.  Anyone have any other etch
chemistries?

thanks

please respond to:  cmarft@ece.ucdavis.edu



********************************************
Carl Arft
Dept. of Electrical and Computer Engineering
University of California, Davis
Email: cmarft@ece.ucdavis.edu
Phone: (530) 754-9249
********************************************


reply