Transene makes an etch called TFB for nickel

David Nemeth
Senior Process Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA
Ph: (703) 961-9573 x206
Fax:(703) 961-9576

-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org]On Behalf Of Carl Arft
Sent: Thursday, January 09, 2003 2:42 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] Anyone know a good nickel etch?


I'm trying to pattern nickel with photoresist.  Aqua regia seems to etch
too quickly, and leaves some nickel un-etched.  Anyone have any other etch
chemistries?

thanks

please respond to:  cmarft@ece.ucdavis.edu



********************************************
Carl Arft
Dept. of Electrical and Computer Engineering
University of California, Davis
Email: cmarft@ece.ucdavis.edu
Phone: (530) 754-9249
********************************************


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