Yes, Thanks,

Hanqing

At 08:59 AM 1/10/03 -0500, you wrote:
>Transene makes an etch called TFB for nickel
>
>David Nemeth
>Senior Process Engineer
>Sophia Wireless, Inc.
>14225-C Sullyfield Circle
>Chantilly, VA
>Ph: (703) 961-9573 x206
>Fax:(703) 961-9576
>
>-----Original Message-----
>From: mems-talk-bounces@memsnet.org
>[mailto:mems-talk-bounces@memsnet.org]On Behalf Of Carl Arft
>Sent: Thursday, January 09, 2003 2:42 PM
>To: mems-talk@memsnet.org
>Subject: [mems-talk] Anyone know a good nickel etch?
>
>
>I'm trying to pattern nickel with photoresist.  Aqua regia seems to etch
>too quickly, and leaves some nickel un-etched.  Anyone have any other etch
>chemistries?
>
>thanks
>
>please respond to:  cmarft@ece.ucdavis.edu
>
>
>
>********************************************
>Carl Arft
>Dept. of Electrical and Computer Engineering
>University of California, Davis
>Email: cmarft@ece.ucdavis.edu
>Phone: (530) 754-9249
>********************************************
>
>
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===========================================
Hanqing Li, Ph.D.
Research Scientist
Massachusetts Institute of Technology
Microsystems Technology Laboratories
Phone: (617)-258-5920,  Fax (617)-258-5940
===========================================