Aluminum Etch works well for Ni

----- Original Message -----
From: "Carl Arft" 
To: 
Sent: Thursday, January 09, 2003 11:41 AM
Subject: [mems-talk] Anyone know a good nickel etch?


> I'm trying to pattern nickel with photoresist.  Aqua regia seems to etch
> too quickly, and leaves some nickel un-etched.  Anyone have any other etch
> chemistries?
>
> thanks
>
> please respond to:  cmarft@ece.ucdavis.edu
>
>
>
> ********************************************
> Carl Arft
> Dept. of Electrical and Computer Engineering
> University of California, Davis
> Email: cmarft@ece.ucdavis.edu
> Phone: (530) 754-9249
> ********************************************
>
>
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