Dear MEMS fellas,
Looking forward ordering SOI wafers for some microsystems activity (mainly
optical switches) and just wonder what type of structural Si N or P should I
use. In fact, I noticed that JDS Uniphase are using N type for there muti_user
process (MUMP's SOI). My concern is about the reasons for which the N type is
probably preferred for micromachining and in which cases, brief what are the
cons and pros of using either types. Thank you in advance
Sofiane




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