Dear all,

i want to structure tungsten dry with PR as masking layer.
Does anybody have experiences on etchrates, selectivities
to SiO2. I thought about CH4, SF6 or Ar as gases.

Regards,

Stefan Junge


--
Institute for Microsensors, -actuators and -systems (IMSAS)
University of Bremen
Stefan Junge (Ph.D student)
Dep. 1: Physics/Electrical Engineering
Otto-Hahn-Allee
28359 Bremen, Germany

P.O. Box 330 440
28334 Bremen, Germany

Tel.: +49-421-218-3586
Fax.: +49-421-218-4774
E-Mail: sjunge@imsas.uni-bremen.de
Internet: www.imsas.uni-bremen.de