I'm from Brasil working as a researcher in a university interested in build a infra-structure for MEMS and CI design and prototyping and manufacture in very low volume. Actually, Brasil doesn't have this infra-structure. It isn´t our intent manufacture CI (- memory, microprocessor....) or MEMS (airbag sensor, MEMS for inkjet,...). It is our intent focus on specialized market, like biotech for example. We are initially planning to build a infra-estructure with 500m2 of cleanroom classes 10 and 100. I´m looking for information about equipments to constitute this kind of infra-structure, for this moment just a idea, (I understand that this is a difficulty task): What are these essential equipments?, and costs of this equipments (approximate)? Can I use, depending of the mems, the same equipment for mems and CI prototyping? Further.... Beyond the cleanroom....what kind of laboratories (and equipment related) is necessary ? I was wondering if you could help me? Thank you very very much Cesare Quinteiro Pica, MSc Universidade Federal de Santa Catarina Florianópolis, Santa Catarina, Brasil